Pulsed VUV sources and their application to surface cleaning of optical materials

D. M. Kane, D. Hirschausen, B. K. Ward, R. J. Carman, R. P. Mildren

Research output: Contribution to journalArticleResearchpeer-review

Abstract

Development of pulsed excitation techniques for high-pressure dielectric barrier discharges (DBD) has led to a short-pulsed, high-peak-power, spatially uniform source of UV7VUV radiation - a preferred type of output for materials processing and many other applications. Results of such a Xe2* DBD source at 172 nm for removing mountants from optical surfaces and for removing hydrocarbon contamination from optical and polymer surfaces are presented.

LanguageEnglish
Pages100-106
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5399
DOIs
Publication statusPublished - 2004

Fingerprint

Surface cleaning
Optical Materials
Optical materials
Cleaning
optical materials
cleaning
Materials Processing
Hydrocarbons
Contamination
Polymers
contamination
hydrocarbons
Excitation
Radiation
output
Output
polymers
radiation
Processing
excitation

Keywords

  • DBD
  • Glass cleaning
  • Optical surface cleaning
  • Polymers
  • Short pulse VUV source
  • Surface cleaning
  • Surface treatment

Cite this

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Pulsed VUV sources and their application to surface cleaning of optical materials. / Kane, D. M.; Hirschausen, D.; Ward, B. K.; Carman, R. J.; Mildren, R. P.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 5399, 2004, p. 100-106.

Research output: Contribution to journalArticleResearchpeer-review

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KW - Surface treatment

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