Pulsed VUV sources and their application to surface cleaning of optical materials

D. M. Kane*, D. Hirschausen, B. K. Ward, R. J. Carman, R. P. Mildren

*Corresponding author for this work

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Development of pulsed excitation techniques for high-pressure dielectric barrier discharges (DBD) has led to a short-pulsed, high-peak-power, spatially uniform source of UV7VUV radiation - a preferred type of output for materials processing and many other applications. Results of such a Xe2* DBD source at 172 nm for removing mountants from optical surfaces and for removing hydrocarbon contamination from optical and polymer surfaces are presented.

Original languageEnglish
Pages (from-to)100-106
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5399
DOIs
Publication statusPublished - 2004

Keywords

  • DBD
  • Glass cleaning
  • Optical surface cleaning
  • Polymers
  • Short pulse VUV source
  • Surface cleaning
  • Surface treatment

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