Abstract
Development of pulsed excitation techniques for high-pressure dielectric barrier discharges (DBD) has led to a short-pulsed, high-peak-power, spatially uniform source of UV7VUV radiation - a preferred type of output for materials processing and many other applications. Results of such a Xe2* DBD source at 172 nm for removing mountants from optical surfaces and for removing hydrocarbon contamination from optical and polymer surfaces are presented.
Original language | English |
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Pages (from-to) | 100-106 |
Number of pages | 7 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 5399 |
DOIs | |
Publication status | Published - 2004 |
Keywords
- DBD
- Glass cleaning
- Optical surface cleaning
- Polymers
- Short pulse VUV source
- Surface cleaning
- Surface treatment