Quantum electro-mechanical systems (QEMS)

D. Wahyu Utami, Gerard J. Milburn, Hsi-Sheng Goan

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We give a quantum description of a Quantum Electro-Mechanical System(QEMS) comprising a single quantum dot harmonically bound between two electrodes and facilitating a tunnelling current between them. An example of such a system is a fullerene molecule between two metal electrodes. The description is based on a quantum master equation for the density operator of the electronic and vibrational degrees of freedom and thus incorporates the dynamics of both diagonal (population) and off diagonal (coherence) terms. We derive coupled equations of motion for the electron occupation number of the dot and the vibrational degrees of freedom, including damping of the vibration and thermo-mechanical noise, and give a semiclassical description of the dynamics under a variety of bias conditions. This dynamical description is related to observable features of the system including the stationary conductance as a function of bias voltage.
Original languageEnglish
Title of host publicationDevice and process technologies for MEMS, microelectronics, and photonics III
Subtitle of host publication10-12 December 2003, Perth, Australia
EditorsJung-Chih Chiao, Alex J. Hariz, David N. Jamieson, Giacinta Parish, Vijay K. Varadan
Place of PublicationBellingham, Washington
Number of pages11
ISBN (Print)081945169X
Publication statusPublished - 2004
Externally publishedYes
EventDevice and Process Technologies for MEMS, Microelectronics, and Photonics (3rd : 2003) - Perth
Duration: 10 Dec 200312 Dec 2003

Publication series

NameProceedings of SPIE
ISSN (Print)0277-786X


ConferenceDevice and Process Technologies for MEMS, Microelectronics, and Photonics (3rd : 2003)


  • MEMS
  • Nano electro mechanical system
  • NEMS
  • Quantum electro mechanical System
  • Single electron transistor
  • Vibrational quanta


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