Reactive sputtered TixNbyN coatings. II. Effect of common deposition parameters

L. Sheppard, H. Zhang, R. Liu, S. Macartney, T. Murphy, P. Wainer, R. Wuhrer

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


TiNbN coatings are being applied to orthopaedic hip and knee implants for the purpose of improved wear resistance and reduced friction during application. However, the performance of these coatings is not always satisfactory and improvements in reliability in particular, are needed. Fundamentally, this stems from a lack of materials processing knowledge. In the present investigation, TixNbyNz coatings have been processed using reactive magnetron sputtering. The aim has been to establish the fundamental relationships that exist between several common sputtering parameters and the material properties exhibited by the resulting coatings. The sputtering parameters include deposition pressure, nitrogen partial pressure, applied substrate heating, and applied substrate bias, and the materials properties include composition, structure, microstructure and surface roughness. The present investigation is the second of a two component investigation on the processing of TixNbyNz coatings.
Original languageEnglish
Pages (from-to)320-327
Number of pages8
JournalMaterials Chemistry and Physics
Early online date17 Dec 2018
Publication statusPublished - 15 Feb 2019


  • Titanium niobium nitride
  • Titanium nitride
  • Niobium nitride
  • Magnetron sputtering
  • Thin film
  • Orthopaedic coatings


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