Real time optical 3D nanoscope using phase contrast digital holography

D. Kim; A. Zvyagin; H. Lee; Y. Cho

doi:10.1063/1.3666748

Real time optical 3D nanoscope using phase contrast digital holography

D. Kim^*, A. Zvyagin, H. Lee, Y. Cho

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

Abstract

We describe a novel real time optical 3D nanoscope scheme that can be applied for both metrology and inspection in various semiconductor fields. The optical 3D nanoscope proposed in this paper is based on off-axis phase contrast digital holography.

Original language	English
Title of host publication	Physics of semiconductors
Subtitle of host publication	30th International Conference on the Physics of Semiconductors: Seoul, Korea, 25-30 July 2010
Editors	Jisoon Ihm, Hyeonsik Cheong
Place of Publication	Melville, NY
Publisher	American Institute of Physics
Pages	1071-1072
Number of pages	2
ISBN (Print)	9780735410022
DOIs	https://doi.org/10.1063/1.3666748
Publication status	Published - 2011
Event	30th International Conference on the Physics of Semiconductors, ICPS-30 - Seoul, Korea, Republic of Duration: 25 Jul 2010 → 30 Jul 2010

Publication series

Name	AIP conference proceedings
Volume	1399
ISSN (Print)	0094-243X

Other

Other	30th International Conference on the Physics of Semiconductors, ICPS-30
Country/Territory	Korea, Republic of
City	Seoul
Period	25/07/10 → 30/07/10

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10.1063/1.3666748

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Kim, D., Zvyagin, A., Lee, H., & Cho, Y. (2011). Real time optical 3D nanoscope using phase contrast digital holography. In J. Ihm, & H. Cheong (Eds.), Physics of semiconductors: 30th International Conference on the Physics of Semiconductors: Seoul, Korea, 25-30 July 2010 (pp. 1071-1072). (AIP conference proceedings; Vol. 1399). American Institute of Physics. https://doi.org/10.1063/1.3666748

Kim, D. ; Zvyagin, A. ; Lee, H. et al. / Real time optical 3D nanoscope using phase contrast digital holography. Physics of semiconductors: 30th International Conference on the Physics of Semiconductors: Seoul, Korea, 25-30 July 2010. editor / Jisoon Ihm ; Hyeonsik Cheong. Melville, NY : American Institute of Physics, 2011. pp. 1071-1072 (AIP conference proceedings).

@inproceedings{42ba8be53d124c2cb0d1d84f24eebd76,

title = "Real time optical 3D nanoscope using phase contrast digital holography",

abstract = "We describe a novel real time optical 3D nanoscope scheme that can be applied for both metrology and inspection in various semiconductor fields. The optical 3D nanoscope proposed in this paper is based on off-axis phase contrast digital holography.",

author = "D. Kim and A. Zvyagin and H. Lee and Y. Cho",

year = "2011",

doi = "10.1063/1.3666748",

language = "English",

isbn = "9780735410022",

series = "AIP conference proceedings",

publisher = "American Institute of Physics",

pages = "1071--1072",

editor = "Jisoon Ihm and Hyeonsik Cheong",

booktitle = "Physics of semiconductors",

address = "United States",

note = "30th International Conference on the Physics of Semiconductors, ICPS-30 ; Conference date: 25-07-2010 Through 30-07-2010",

}

Kim, D, Zvyagin, A, Lee, H & Cho, Y 2011, Real time optical 3D nanoscope using phase contrast digital holography. in J Ihm & H Cheong (eds), Physics of semiconductors: 30th International Conference on the Physics of Semiconductors: Seoul, Korea, 25-30 July 2010. AIP conference proceedings, vol. 1399, American Institute of Physics, Melville, NY, pp. 1071-1072, 30th International Conference on the Physics of Semiconductors, ICPS-30, Seoul, Korea, Republic of, 25/07/10. https://doi.org/10.1063/1.3666748

Real time optical 3D nanoscope using phase contrast digital holography. / Kim, D.; Zvyagin, A.; Lee, H. et al.
Physics of semiconductors: 30th International Conference on the Physics of Semiconductors: Seoul, Korea, 25-30 July 2010. ed. / Jisoon Ihm; Hyeonsik Cheong. Melville, NY: American Institute of Physics, 2011. p. 1071-1072 (AIP conference proceedings; Vol. 1399).

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

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T1 - Real time optical 3D nanoscope using phase contrast digital holography

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AU - Zvyagin, A.

AU - Lee, H.

AU - Cho, Y.

PY - 2011

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N2 - We describe a novel real time optical 3D nanoscope scheme that can be applied for both metrology and inspection in various semiconductor fields. The optical 3D nanoscope proposed in this paper is based on off-axis phase contrast digital holography.

AB - We describe a novel real time optical 3D nanoscope scheme that can be applied for both metrology and inspection in various semiconductor fields. The optical 3D nanoscope proposed in this paper is based on off-axis phase contrast digital holography.

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BT - Physics of semiconductors

A2 - Ihm, Jisoon

A2 - Cheong, Hyeonsik

PB - American Institute of Physics

CY - Melville, NY

T2 - 30th International Conference on the Physics of Semiconductors, ICPS-30

Y2 - 25 July 2010 through 30 July 2010

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Kim D, Zvyagin A, Lee H, Cho Y. Real time optical 3D nanoscope using phase contrast digital holography. In Ihm J, Cheong H, editors, Physics of semiconductors: 30th International Conference on the Physics of Semiconductors: Seoul, Korea, 25-30 July 2010. Melville, NY: American Institute of Physics. 2011. p. 1071-1072. (AIP conference proceedings). doi: 10.1063/1.3666748

Real time optical 3D nanoscope using phase contrast digital holography

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