Real time optical 3D nanoscope using phase contrast digital holography

D. Kim*, A. Zvyagin, H. Lee, Y. Cho

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference proceeding contribution

Abstract

We describe a novel real time optical 3D nanoscope scheme that can be applied for both metrology and inspection in various semiconductor fields. The optical 3D nanoscope proposed in this paper is based on off-axis phase contrast digital holography.

Original languageEnglish
Title of host publicationPhysics of semiconductors
Subtitle of host publication30th International Conference on the Physics of Semiconductors: Seoul, Korea, 25-30 July 2010
EditorsJisoon Ihm, Hyeonsik Cheong
Place of PublicationMelville, NY
PublisherAmerican Institute of Physics
Pages1071-1072
Number of pages2
ISBN (Print)9780735410022
DOIs
Publication statusPublished - 2011
Event30th International Conference on the Physics of Semiconductors, ICPS-30 - Seoul, Korea, Republic of
Duration: 25 Jul 201030 Jul 2010

Publication series

NameAIP conference proceedings
Volume1399
ISSN (Print)0094-243X

Other

Other30th International Conference on the Physics of Semiconductors, ICPS-30
CountryKorea, Republic of
CitySeoul
Period25/07/1030/07/10

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