Abstract
An overview is given of recent achievements of the Materials Processing Branch of the Short Wavelengths and Interactions with Materials (SWIM) program at Macquarie University. This research focuses on using shortpulsed UV lasers and other novel VUV sources to clean small particles (including sub-micron particles) and hydrocarbons from optical, optoelectronic and photonic materials.
Original language | English |
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Title of host publication | 2002 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2002 - Proceedings |
Editors | Michael Gal |
Place of Publication | Piscataway, NJ |
Publisher | Institute of Electrical and Electronics Engineers (IEEE) |
Pages | 205-208 |
Number of pages | 4 |
ISBN (Print) | 0780375718 |
DOIs | |
Publication status | Published - 2002 |
Event | Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2002 - Sydney, Australia Duration: 11 Dec 2002 → 13 Dec 2002 |
Other
Other | Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2002 |
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Country/Territory | Australia |
City | Sydney |
Period | 11/12/02 → 13/12/02 |