Recent advances in UV and VUV cleaning of optical materials

D. M. Kane; A. J. Fernandes; D. Hirschausen; S. Pleasants; B. K. Ward

doi:10.1109/COMMAD.2002.1237228

Recent advances in UV and VUV cleaning of optical materials

D. M. Kane, A. J. Fernandes, D. Hirschausen, S. Pleasants, B. K. Ward

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution

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Abstract

An overview is given of recent achievements of the Materials Processing Branch of the Short Wavelengths and Interactions with Materials (SWIM) program at Macquarie University. This research focuses on using shortpulsed UV lasers and other novel VUV sources to clean small particles (including sub-micron particles) and hydrocarbons from optical, optoelectronic and photonic materials.

Original language	English
Title of host publication	2002 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2002 - Proceedings
Editors	Michael Gal
Place of Publication	Piscataway, NJ
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	205-208
Number of pages	4
ISBN (Print)	0780375718
DOIs	https://doi.org/10.1109/COMMAD.2002.1237228
Publication status	Published - 2002
Event	Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2002 - Sydney, Australia Duration: 11 Dec 2002 → 13 Dec 2002

Other

Other	Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2002
Country	Australia
City	Sydney
Period	11/12/02 → 13/12/02

Bibliographical note

Copyright 2003 IEEE. Reprinted from Proceedings of the 2002 conference on optoelectronic and microelectronic materials and devices. This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of Macquarie Universityâ€™s products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org. By choosing to view this document, you agree to all provisions of the copyright laws protecting it.

Access to Document

10.1109/COMMAD.2002.1237228

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Kane, D. M., Fernandes, A. J., Hirschausen, D., Pleasants, S., & Ward, B. K. (2002). Recent advances in UV and VUV cleaning of optical materials. In M. Gal (Ed.), 2002 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2002 - Proceedings (pp. 205-208). [1237228] Piscataway, NJ: Institute of Electrical and Electronics Engineers (IEEE). https://doi.org/10.1109/COMMAD.2002.1237228

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author = "Kane, {D. M.} and Fernandes, {A. J.} and D. Hirschausen and S. Pleasants and Ward, {B. K.}",

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Kane, DM, Fernandes, AJ, Hirschausen, D, Pleasants, S & Ward, BK 2002, Recent advances in UV and VUV cleaning of optical materials. in M Gal (ed.), 2002 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2002 - Proceedings., 1237228, Institute of Electrical and Electronics Engineers (IEEE), Piscataway, NJ, pp. 205-208, Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2002, Sydney, Australia, 11/12/02. https://doi.org/10.1109/COMMAD.2002.1237228

Recent advances in UV and VUV cleaning of optical materials. / Kane, D. M.; Fernandes, A. J.; Hirschausen, D.; Pleasants, S.; Ward, B. K.

2002 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2002 - Proceedings. ed. / Michael Gal. Piscataway, NJ : Institute of Electrical and Electronics Engineers (IEEE), 2002. p. 205-208 1237228.

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution

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Kane DM, Fernandes AJ, Hirschausen D, Pleasants S, Ward BK. Recent advances in UV and VUV cleaning of optical materials. In Gal M, editor, 2002 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2002 - Proceedings. Piscataway, NJ: Institute of Electrical and Electronics Engineers (IEEE). 2002. p. 205-208. 1237228 https://doi.org/10.1109/COMMAD.2002.1237228