Recent advances in UV and VUV cleaning of optical materials

D. M. Kane, A. J. Fernandes, D. Hirschausen, S. Pleasants, B. K. Ward

Research output: Chapter in Book/Report/Conference proceedingConference proceeding contribution

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Abstract

An overview is given of recent achievements of the Materials Processing Branch of the Short Wavelengths and Interactions with Materials (SWIM) program at Macquarie University. This research focuses on using shortpulsed UV lasers and other novel VUV sources to clean small particles (including sub-micron particles) and hydrocarbons from optical, optoelectronic and photonic materials.

Original languageEnglish
Title of host publication2002 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2002 - Proceedings
EditorsMichael Gal
Place of PublicationPiscataway, NJ
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages205-208
Number of pages4
ISBN (Print)0780375718
DOIs
Publication statusPublished - 2002
EventConference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2002 - Sydney, Australia
Duration: 11 Dec 200213 Dec 2002

Other

OtherConference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2002
CountryAustralia
CitySydney
Period11/12/0213/12/02

Bibliographical note

Copyright 2003 IEEE. Reprinted from Proceedings of the 2002 conference on optoelectronic and microelectronic materials and devices. This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of Macquarie University’s products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org. By choosing to view this document, you agree to all provisions of the copyright laws protecting it.

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