Removing particles from glass with ultraviolet laser cleaning

D. R. Halfpenny; D. M. Kane

doi:10.1109/CLEO.1998.676217

Removing particles from glass with ultraviolet laser cleaning

D. R. Halfpenny^*, D. M. Kane

^*Corresponding author for this work

School of Computing

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

Abstract

A study was conducted which showed that particles as small as 0.1 μm diameter can be successfully removed from the glass surface. In order to obtain quantitative data from such images, the difference in surface particle was measured before and after irradiation for a range of fluences and particle sizes. The results reveal that: laser cleaning occurs after a definite threshold is reached; after the cleaning threshold is reached, the difference in surface particle density before and after irradiation follows a definite trend with respect to fluence; and the area cleaned depends on the beam area above the threshold fluence for cleaning.

Original language	English
Title of host publication	Conference on Lasers and Electro-Optics Europe, CLEO 1998
Place of Publication	Piscataway, NJ
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	315-316
Number of pages	2
ISBN (Print)	1557523390
DOIs	https://doi.org/10.1109/CLEO.1998.676217
Publication status	Published - 1998
Event	Proceedings of the 1998 Conference on Lasers and Electro-Optics, CLEO - San Francisco, CA, USA Duration: 3 May 1998 → 8 May 1998

Other

Other	Proceedings of the 1998 Conference on Lasers and Electro-Optics, CLEO
City	San Francisco, CA, USA
Period	3/05/98 → 8/05/98

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10.1109/CLEO.1998.676217

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title = "Removing particles from glass with ultraviolet laser cleaning",

abstract = "A study was conducted which showed that particles as small as 0.1 μm diameter can be successfully removed from the glass surface. In order to obtain quantitative data from such images, the difference in surface particle was measured before and after irradiation for a range of fluences and particle sizes. The results reveal that: laser cleaning occurs after a definite threshold is reached; after the cleaning threshold is reached, the difference in surface particle density before and after irradiation follows a definite trend with respect to fluence; and the area cleaned depends on the beam area above the threshold fluence for cleaning.",

author = "Halfpenny, {D. R.} and Kane, {D. M.}",

year = "1998",

doi = "10.1109/CLEO.1998.676217",

language = "English",

isbn = "1557523390",

pages = "315--316",

booktitle = "Conference on Lasers and Electro-Optics Europe, CLEO 1998",

publisher = "Institute of Electrical and Electronics Engineers (IEEE)",

address = "United States",

note = "Proceedings of the 1998 Conference on Lasers and Electro-Optics, CLEO ; Conference date: 03-05-1998 Through 08-05-1998",

}

Halfpenny, DR & Kane, DM 1998, Removing particles from glass with ultraviolet laser cleaning. in Conference on Lasers and Electro-Optics Europe, CLEO 1998., 676217, Institute of Electrical and Electronics Engineers (IEEE), Piscataway, NJ, pp. 315-316, Proceedings of the 1998 Conference on Lasers and Electro-Optics, CLEO, San Francisco, CA, USA, 3/05/98. https://doi.org/10.1109/CLEO.1998.676217

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AU - Halfpenny, D. R.

AU - Kane, D. M.

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N2 - A study was conducted which showed that particles as small as 0.1 μm diameter can be successfully removed from the glass surface. In order to obtain quantitative data from such images, the difference in surface particle was measured before and after irradiation for a range of fluences and particle sizes. The results reveal that: laser cleaning occurs after a definite threshold is reached; after the cleaning threshold is reached, the difference in surface particle density before and after irradiation follows a definite trend with respect to fluence; and the area cleaned depends on the beam area above the threshold fluence for cleaning.

AB - A study was conducted which showed that particles as small as 0.1 μm diameter can be successfully removed from the glass surface. In order to obtain quantitative data from such images, the difference in surface particle was measured before and after irradiation for a range of fluences and particle sizes. The results reveal that: laser cleaning occurs after a definite threshold is reached; after the cleaning threshold is reached, the difference in surface particle density before and after irradiation follows a definite trend with respect to fluence; and the area cleaned depends on the beam area above the threshold fluence for cleaning.

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DO - 10.1109/CLEO.1998.676217

M3 - Conference proceeding contribution

AN - SCOPUS:0031617956

SN - 1557523390

SP - 315

EP - 316

BT - Conference on Lasers and Electro-Optics Europe, CLEO 1998

PB - Institute of Electrical and Electronics Engineers (IEEE)

CY - Piscataway, NJ

T2 - Proceedings of the 1998 Conference on Lasers and Electro-Optics, CLEO

Y2 - 3 May 1998 through 8 May 1998

ER -

Removing particles from glass with ultraviolet laser cleaning

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