Removing particles from glass with ultraviolet laser cleaning

D. R. Halfpenny*, D. M. Kane

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference proceeding contributionpeer-review

Abstract

A study was conducted which showed that particles as small as 0.1 μm diameter can be successfully removed from the glass surface. In order to obtain quantitative data from such images, the difference in surface particle was measured before and after irradiation for a range of fluences and particle sizes. The results reveal that: laser cleaning occurs after a definite threshold is reached; after the cleaning threshold is reached, the difference in surface particle density before and after irradiation follows a definite trend with respect to fluence; and the area cleaned depends on the beam area above the threshold fluence for cleaning.

Original languageEnglish
Title of host publicationConference on Lasers and Electro-Optics Europe, CLEO 1998
Place of PublicationPiscataway, NJ
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages315-316
Number of pages2
ISBN (Print)1557523390
DOIs
Publication statusPublished - 1998
EventProceedings of the 1998 Conference on Lasers and Electro-Optics, CLEO - San Francisco, CA, USA
Duration: 3 May 19988 May 1998

Other

OtherProceedings of the 1998 Conference on Lasers and Electro-Optics, CLEO
CitySan Francisco, CA, USA
Period3/05/988/05/98

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