Abstract
Continuous-relief diffractive optical elements have been replicated by use of conventional compact disc injection-molding techniques. Two continuous-relief microstructures, a blazed grating and a fan-out element, were chosen to evaluate the replication process. Original elements were fabricated by directwrite electron-beam lithography. Optical measurements and atomic force microscopy were used for investigating the replication fidelity.
Original language | English |
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Pages (from-to) | 4655-4659 |
Number of pages | 5 |
Journal | Applied Optics |
Volume | 36 |
Issue number | 20 |
DOIs | |
Publication status | Published - 10 Jul 1997 |
Keywords
- Compact disc
- Diffractive optics
- Electron-beam lithography
- Injection molding
- Replication