Continuous-relief diffractive optical elements have been replicated using conventional compact disc injection molding techniques. Two continuous-relief micro-structures, a blazed grating and a fan-out element, were chosen to evaluate the replication process. Original elements were fabricated by direct-write electron beam lithography. Optical measurements and atomic force microscopy were used for investigating the replication fidelity.
|Number of pages
|Doktorsavhandlingar vid Chalmers Tekniska Hogskola
|Published - 1997