Abstract
Continuous-relief diffractive optical elements have been replicated using conventional compact disc injection molding techniques. Two continuous-relief micro-structures, a blazed grating and a fan-out element, were chosen to evaluate the replication process. Original elements were fabricated by direct-write electron beam lithography. Optical measurements and atomic force microscopy were used for investigating the replication fidelity.
Original language | English |
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Pages (from-to) | 1-13 |
Number of pages | 13 |
Journal | Doktorsavhandlingar vid Chalmers Tekniska Hogskola |
Issue number | 1263 |
Publication status | Published - 1997 |