Replication of continuous-relief diffractive optical elements by conventional compact disc injection molding techniques

Fredrik Nikolajeff*, Stellan Jacobsson, Sverker Hard, Ake Billman, Lars Lundblach, Curt Lindell

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    Abstract

    Continuous-relief diffractive optical elements have been replicated using conventional compact disc injection molding techniques. Two continuous-relief micro-structures, a blazed grating and a fan-out element, were chosen to evaluate the replication process. Original elements were fabricated by direct-write electron beam lithography. Optical measurements and atomic force microscopy were used for investigating the replication fidelity.

    Original languageEnglish
    Pages (from-to)1-13
    Number of pages13
    JournalDoktorsavhandlingar vid Chalmers Tekniska Hogskola
    Issue number1263
    Publication statusPublished - 1997

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