TY - JOUR
T1 - Research progress of stress measurement technologies for optical elements
AU - Wei, Shan
AU - Pang, Yajun
AU - Bai, Zhenxu
AU - Wang, Yulei
AU - Lu, Zhiwei
N1 - Copyright © 2021 Shan Wei et al. Version archived for private and non-commercial use with the permission of the author/s and according to publisher conditions. For further rights please contact the publisher.
PY - 2021/4/20
Y1 - 2021/4/20
N2 - It is of great significance to measure the residual stress distribution accurately for optical elements and evaluate its influence on the performance of optical instruments in optical imaging, aviation remote sensing, semiconductor manufacturing, and other fields. The stress of optical elements can be closely related to birefringence based on photoelasticity. Thus, the method of quantifying birefringence to obtain the stress becomes the main method of stress measurement technologies for optical elements. This paper first introduces the basic principle of stress measurement based on photoelasticity. Then, the research progress of stress measurement technologies based on this principle is reviewed, which can be classified into two methods: polarization method and interference method. Meanwhile, the advantages and disadvantages of various stress measurement technologies are analyzed and compared. Finally, the developing trend of stress measurement technologies for optical elements is summarized and prospected.
AB - It is of great significance to measure the residual stress distribution accurately for optical elements and evaluate its influence on the performance of optical instruments in optical imaging, aviation remote sensing, semiconductor manufacturing, and other fields. The stress of optical elements can be closely related to birefringence based on photoelasticity. Thus, the method of quantifying birefringence to obtain the stress becomes the main method of stress measurement technologies for optical elements. This paper first introduces the basic principle of stress measurement based on photoelasticity. Then, the research progress of stress measurement technologies based on this principle is reviewed, which can be classified into two methods: polarization method and interference method. Meanwhile, the advantages and disadvantages of various stress measurement technologies are analyzed and compared. Finally, the developing trend of stress measurement technologies for optical elements is summarized and prospected.
UR - http://www.scopus.com/inward/record.url?scp=85105377902&partnerID=8YFLogxK
U2 - 10.1155/2021/5541358
DO - 10.1155/2021/5541358
M3 - Review article
AN - SCOPUS:85105377902
VL - 2021
SP - 1
EP - 11
JO - International Journal of Optics
JF - International Journal of Optics
SN - 1687-9384
M1 - 5541358
ER -