Self-aligned optofiber/waveguide connector with integrated V-grooves and diffractive optical elements

F. Nikolajeff; O. Larsson; S. Hård; M. Kindlundh

doi:10.1109/OMEMS.2002.1031504

Self-aligned optofiber/waveguide connector with integrated V-grooves and diffractive optical elements

F. Nikolajeff^*, O. Larsson, S. Hård, M. Kindlundh

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

Abstract

We demonstrate a novel type of self-aligned optofiber/waveguide connector with integrated V-grooves and diffractive optical elements. The self-alignment is achieved by connecting microstructures which have originally been formed in silicon and later replicated in concave and convex forms. V-grooves hold the optical fibers and the light is coupled out through diffractive optical elements (DOEs). A manufacturing process has been developed which allows both deep microstructures (V-grooves and alignment structures) and shallow surface reliefs (diffractive elements) to be realized on the same substrate. The self-alignment using microstructures allows a positioning accuracy of about ±5 μm. Two different fan-out DOEs have been optically characterized.

Original language	English
Title of host publication	2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	185-186
Number of pages	2
ISBN (Electronic)	0780375955, 9780780375956
DOIs	https://doi.org/10.1109/OMEMS.2002.1031504
Publication status	Published - 2002
Event	IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Lugano, Switzerland Duration: 20 Aug 2002 → 23 Aug 2002

Other

Other	IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002
Country/Territory	Switzerland
City	Lugano
Period	20/08/02 → 23/08/02

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10.1109/OMEMS.2002.1031504

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Nikolajeff, F., Larsson, O., Hård, S., & Kindlundh, M. (2002). Self-aligned optofiber/waveguide connector with integrated V-grooves and diffractive optical elements. In 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest (pp. 185-186). Article 1031504 Institute of Electrical and Electronics Engineers (IEEE). https://doi.org/10.1109/OMEMS.2002.1031504

@inproceedings{ee96b47a50604c2bb9c3529a4660d421,

title = "Self-aligned optofiber/waveguide connector with integrated V-grooves and diffractive optical elements",

abstract = "We demonstrate a novel type of self-aligned optofiber/waveguide connector with integrated V-grooves and diffractive optical elements. The self-alignment is achieved by connecting microstructures which have originally been formed in silicon and later replicated in concave and convex forms. V-grooves hold the optical fibers and the light is coupled out through diffractive optical elements (DOEs). A manufacturing process has been developed which allows both deep microstructures (V-grooves and alignment structures) and shallow surface reliefs (diffractive elements) to be realized on the same substrate. The self-alignment using microstructures allows a positioning accuracy of about ±5 μm. Two different fan-out DOEs have been optically characterized.",

author = "F. Nikolajeff and O. Larsson and S. H{\aa}rd and M. Kindlundh",

year = "2002",

doi = "10.1109/OMEMS.2002.1031504",

language = "English",

pages = "185--186",

booktitle = "2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest",

publisher = "Institute of Electrical and Electronics Engineers (IEEE)",

address = "United States",

note = "IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 ; Conference date: 20-08-2002 Through 23-08-2002",

}

Nikolajeff, F, Larsson, O, Hård, S & Kindlundh, M 2002, Self-aligned optofiber/waveguide connector with integrated V-grooves and diffractive optical elements. in 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest., 1031504, Institute of Electrical and Electronics Engineers (IEEE), pp. 185-186, IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002, Lugano, Switzerland, 20/08/02. https://doi.org/10.1109/OMEMS.2002.1031504

Self-aligned optofiber/waveguide connector with integrated V-grooves and diffractive optical elements. / Nikolajeff, F.; Larsson, O.; Hård, S. et al.
2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest. Institute of Electrical and Electronics Engineers (IEEE), 2002. p. 185-186 1031504.

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

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AU - Hård, S.

AU - Kindlundh, M.

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N2 - We demonstrate a novel type of self-aligned optofiber/waveguide connector with integrated V-grooves and diffractive optical elements. The self-alignment is achieved by connecting microstructures which have originally been formed in silicon and later replicated in concave and convex forms. V-grooves hold the optical fibers and the light is coupled out through diffractive optical elements (DOEs). A manufacturing process has been developed which allows both deep microstructures (V-grooves and alignment structures) and shallow surface reliefs (diffractive elements) to be realized on the same substrate. The self-alignment using microstructures allows a positioning accuracy of about ±5 μm. Two different fan-out DOEs have been optically characterized.

AB - We demonstrate a novel type of self-aligned optofiber/waveguide connector with integrated V-grooves and diffractive optical elements. The self-alignment is achieved by connecting microstructures which have originally been formed in silicon and later replicated in concave and convex forms. V-grooves hold the optical fibers and the light is coupled out through diffractive optical elements (DOEs). A manufacturing process has been developed which allows both deep microstructures (V-grooves and alignment structures) and shallow surface reliefs (diffractive elements) to be realized on the same substrate. The self-alignment using microstructures allows a positioning accuracy of about ±5 μm. Two different fan-out DOEs have been optically characterized.

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BT - 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

PB - Institute of Electrical and Electronics Engineers (IEEE)

T2 - IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002

Y2 - 20 August 2002 through 23 August 2002

ER -

Self-aligned optofiber/waveguide connector with integrated V-grooves and diffractive optical elements

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