Self-aligned optofiber/waveguide connector with integrated V-grooves and diffractive optical elements

F. Nikolajeff*, O. Larsson, S. Hård, M. Kindlundh

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference proceeding contribution

Abstract

We demonstrate a novel type of self-aligned optofiber/waveguide connector with integrated V-grooves and diffractive optical elements. The self-alignment is achieved by connecting microstructures which have originally been formed in silicon and later replicated in concave and convex forms. V-grooves hold the optical fibers and the light is coupled out through diffractive optical elements (DOEs). A manufacturing process has been developed which allows both deep microstructures (V-grooves and alignment structures) and shallow surface reliefs (diffractive elements) to be realized on the same substrate. The self-alignment using microstructures allows a positioning accuracy of about ±5 μm. Two different fan-out DOEs have been optically characterized.

Original languageEnglish
Title of host publication2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages185-186
Number of pages2
ISBN (Electronic)0780375955, 9780780375956
DOIs
Publication statusPublished - 2002
EventIEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Lugano, Switzerland
Duration: 20 Aug 200223 Aug 2002

Other

OtherIEEE/LEOS International Conference on Optical MEMs, OMEMS 2002
CountrySwitzerland
CityLugano
Period20/08/0223/08/02

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    Nikolajeff, F., Larsson, O., Hård, S., & Kindlundh, M. (2002). Self-aligned optofiber/waveguide connector with integrated V-grooves and diffractive optical elements. In 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest (pp. 185-186). [1031504] Institute of Electrical and Electronics Engineers (IEEE). https://doi.org/10.1109/OMEMS.2002.1031504