Shape distortion of diffractive optical elements, directly written with electron beam lithography

F. Nikolajeff*, M. Ekbery, M. Larsson, J. Bengtsson, S. Hard

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

Here, we used repeated development to study the relief shape as a function of development time for a blazed grating structure exposed in a thick, resist layer. The shape was obtained from measured diffraction data. This shape determining method appears to have a better accuracy than stylus measurements.

Original languageEnglish
Pages (from-to)60-61
Number of pages2
JournalIEE Conference Publication
Issue number379
Publication statusPublished - 1993

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