Shear piezoelectric coefficients of gallium nitride and aluminum nitride

S. Muensit*, E. M. Goldys, I. L. Guy

*Corresponding author for this work

Research output: Contribution to journalArticle

56 Citations (Scopus)

Abstract

We have developed a direct method of measuring the shear strain using a laser-based interferometer. The method was applied to the measurement of the d15 coefficient for wurtzite GaN and A1N. A value for d15 of 3.6 ± 0.2pm V-1 for AIN has been obtained, in good agreement with values quoted in the literature. The value of d15 for GaN has also been measured to be 3.1 ± 0.2pm V-1.

Original languageEnglish
Pages (from-to)3965-3967
Number of pages3
JournalApplied Physics Letters
Volume75
Issue number25
Publication statusPublished - 20 Dec 1999

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