Shear piezoelectric coefficients of gallium nitride and aluminum nitride

S. Muensit; E. M. Goldys; I. L. Guy

Shear piezoelectric coefficients of gallium nitride and aluminum nitride

S. Muensit^*, E. M. Goldys, I. L. Guy

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

74 Citations (Scopus)

Abstract

We have developed a direct method of measuring the shear strain using a laser-based interferometer. The method was applied to the measurement of the d₁₅ coefficient for wurtzite GaN and A1N. A value for d₁₅ of 3.6 ± 0.2pm V^-1 for AIN has been obtained, in good agreement with values quoted in the literature. The value of d₁₅ for GaN has also been measured to be 3.1 ± 0.2pm V^-1.

Original language	English
Pages (from-to)	3965-3967
Number of pages	3
Journal	Applied Physics Letters
Volume	75
Issue number	25
Publication status	Published - 20 Dec 1999

Cite this

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title = "Shear piezoelectric coefficients of gallium nitride and aluminum nitride",

abstract = "We have developed a direct method of measuring the shear strain using a laser-based interferometer. The method was applied to the measurement of the d15 coefficient for wurtzite GaN and A1N. A value for d15 of 3.6 ± 0.2pm V-1 for AIN has been obtained, in good agreement with values quoted in the literature. The value of d15 for GaN has also been measured to be 3.1 ± 0.2pm V-1.",

author = "S. Muensit and Goldys, \{E. M.\} and Guy, \{I. L.\}",

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T1 - Shear piezoelectric coefficients of gallium nitride and aluminum nitride

AU - Muensit, S.

AU - Goldys, E. M.

AU - Guy, I. L.

PY - 1999/12/20

Y1 - 1999/12/20

N2 - We have developed a direct method of measuring the shear strain using a laser-based interferometer. The method was applied to the measurement of the d15 coefficient for wurtzite GaN and A1N. A value for d15 of 3.6 ± 0.2pm V-1 for AIN has been obtained, in good agreement with values quoted in the literature. The value of d15 for GaN has also been measured to be 3.1 ± 0.2pm V-1.

AB - We have developed a direct method of measuring the shear strain using a laser-based interferometer. The method was applied to the measurement of the d15 coefficient for wurtzite GaN and A1N. A value for d15 of 3.6 ± 0.2pm V-1 for AIN has been obtained, in good agreement with values quoted in the literature. The value of d15 for GaN has also been measured to be 3.1 ± 0.2pm V-1.

UR - https://www.scopus.com/pages/publications/0037731935

M3 - Article

AN - SCOPUS:0037731935

SN - 0003-6951

VL - 75

SP - 3965

EP - 3967

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 25

ER -

Shear piezoelectric coefficients of gallium nitride and aluminum nitride

Abstract

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