Spatial-mode control of vertical-cavity lasers with micromirrors fabricated and replicated in semiconductor materials

Fredrik Nikolajeff; Todd A. Ballen; James R. Leger; Anand Gopinath; Tzu Chen Lee; Robert C. Williams

doi:10.1364/AO.38.003030

Spatial-mode control of vertical-cavity lasers with micromirrors fabricated and replicated in semiconductor materials

Fredrik Nikolajeff, Todd A. Ballen, James R. Leger, Anand Gopinath, Tzu Chen Lee, Robert C. Williams

Research output: Contribution to journal › Article › peer-review

20 Citations (Scopus)

Abstract

Micromirrors were fabricated in gallium phosphide by mass transport to provide spatial-mode control of vertical-cavity surface-emitting lasers VCSEL’s!. The concave mirrors were used in an external-cavity configuration to provide spatial filtering in the far field. Single-mode cw lasing was demonstrated in 15-mm-diameter VCSEL’s with currents as high as 6 times threshold. The fabrication process was extended to micromirrors in gallium arsenide by use of a replication and dry-etch transfer process.

Original language	English
Pages (from-to)	3030-3038
Number of pages	9
Journal	Applied Optics
Volume	38
Issue number	14
DOIs	https://doi.org/10.1364/AO.38.003030
Publication status	Published - 10 May 1999

Access to Document

10.1364/AO.38.003030

Cite this

@article{d4a414f736f143b29a296dff8732b405,

title = "Spatial-mode control of vertical-cavity lasers with micromirrors fabricated and replicated in semiconductor materials",

abstract = "Micromirrors were fabricated in gallium phosphide by mass transport to provide spatial-mode control of vertical-cavity surface-emitting lasers VCSEL{\textquoteright}s!. The concave mirrors were used in an external-cavity configuration to provide spatial filtering in the far field. Single-mode cw lasing was demonstrated in 15-mm-diameter VCSEL{\textquoteright}s with currents as high as 6 times threshold. The fabrication process was extended to micromirrors in gallium arsenide by use of a replication and dry-etch transfer process.",

author = "Fredrik Nikolajeff and Ballen, {Todd A.} and Leger, {James R.} and Anand Gopinath and Lee, {Tzu Chen} and Williams, {Robert C.}",

year = "1999",

month = may,

day = "10",

doi = "10.1364/AO.38.003030",

language = "English",

volume = "38",

pages = "3030--3038",

journal = "Applied Optics",

issn = "1559-128X",

publisher = "Optical Society of America (OSA)",

number = "14",

}

TY - JOUR

T1 - Spatial-mode control of vertical-cavity lasers with micromirrors fabricated and replicated in semiconductor materials

AU - Nikolajeff, Fredrik

AU - Ballen, Todd A.

AU - Leger, James R.

AU - Gopinath, Anand

AU - Lee, Tzu Chen

AU - Williams, Robert C.

PY - 1999/5/10

Y1 - 1999/5/10

N2 - Micromirrors were fabricated in gallium phosphide by mass transport to provide spatial-mode control of vertical-cavity surface-emitting lasers VCSEL’s!. The concave mirrors were used in an external-cavity configuration to provide spatial filtering in the far field. Single-mode cw lasing was demonstrated in 15-mm-diameter VCSEL’s with currents as high as 6 times threshold. The fabrication process was extended to micromirrors in gallium arsenide by use of a replication and dry-etch transfer process.

AB - Micromirrors were fabricated in gallium phosphide by mass transport to provide spatial-mode control of vertical-cavity surface-emitting lasers VCSEL’s!. The concave mirrors were used in an external-cavity configuration to provide spatial filtering in the far field. Single-mode cw lasing was demonstrated in 15-mm-diameter VCSEL’s with currents as high as 6 times threshold. The fabrication process was extended to micromirrors in gallium arsenide by use of a replication and dry-etch transfer process.

UR - http://www.scopus.com/inward/record.url?scp=0032606556&partnerID=8YFLogxK

U2 - 10.1364/AO.38.003030

DO - 10.1364/AO.38.003030

M3 - Article

C2 - 18319888

AN - SCOPUS:0032606556

SN - 1559-128X

VL - 38

SP - 3030

EP - 3038

JO - Applied Optics

JF - Applied Optics

IS - 14

ER -

Spatial-mode control of vertical-cavity lasers with micromirrors fabricated and replicated in semiconductor materials

Abstract

Access to Document

Other files and links

Fingerprint

Cite this