Spectroscopic ellipsometry of TaNx and VN films

J. Mistrik*, K. Takahashi, R. Antos, M. Aoyama, T. Yamaguchi, Y. Anma, Y. Fukuda, M. B. Takeyama, A. Noya, Z. T. Jiang, S. M. Thurgate, G. V. Riessen

*Corresponding author for this work

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