Stitching Interferometry: A Flexible Solution for Surface Metrology

Paul Murphy*, Greg Forbes, Jon Fleig, Paul Dumas, Marc Tricard

*Corresponding author for this work

Research output: Contribution to Newspaper/Magazine/WebsiteArticle

148 Citations (Scopus)

Abstract

The use of subaperture stitching in increasing the capability of an interferometer is discussed. Parts that would require large transmission spheres can be tested on a stitching system at higher resolution. Advances in the development of algorithms allow system calibration to be an integral part of a stitching system. This enables calibration of lateral errors as well as accurate determination of magnification and distortion.

Original languageEnglish
Pages38-43
Number of pages6
Volume14
No.5
Specialist publicationOptics and Photonics News
Publication statusPublished - 2003
Externally publishedYes

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