Stitching Interferometry: A Flexible Solution for Surface Metrology

Paul Murphy; Greg Forbes; Jon Fleig; Paul Dumas; Marc Tricard

Stitching Interferometry: A Flexible Solution for Surface Metrology

Paul Murphy^*, Greg Forbes, Jon Fleig, Paul Dumas, Marc Tricard

^*Corresponding author for this work

Research output: Contribution to Newspaper/Magazine/Website › Article

179 Citations (Scopus)

Abstract

The use of subaperture stitching in increasing the capability of an interferometer is discussed. Parts that would require large transmission spheres can be tested on a stitching system at higher resolution. Advances in the development of algorithms allow system calibration to be an integral part of a stitching system. This enables calibration of lateral errors as well as accurate determination of magnification and distortion.

Original language	English
Pages	38-43
Number of pages	6
Volume	14
No.	5
Specialist publication	Optics and Photonics News
Publication status	Published - 2003
Externally published	Yes

Cite this

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title = "Stitching Interferometry: A Flexible Solution for Surface Metrology",

abstract = "The use of subaperture stitching in increasing the capability of an interferometer is discussed. Parts that would require large transmission spheres can be tested on a stitching system at higher resolution. Advances in the development of algorithms allow system calibration to be an integral part of a stitching system. This enables calibration of lateral errors as well as accurate determination of magnification and distortion.",

author = "Paul Murphy and Greg Forbes and Jon Fleig and Paul Dumas and Marc Tricard",

year = "2003",

language = "English",

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journal = "Optics and Photonics News",

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T2 - A Flexible Solution for Surface Metrology

AU - Murphy, Paul

AU - Forbes, Greg

AU - Fleig, Jon

AU - Dumas, Paul

AU - Tricard, Marc

PY - 2003

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N2 - The use of subaperture stitching in increasing the capability of an interferometer is discussed. Parts that would require large transmission spheres can be tested on a stitching system at higher resolution. Advances in the development of algorithms allow system calibration to be an integral part of a stitching system. This enables calibration of lateral errors as well as accurate determination of magnification and distortion.

AB - The use of subaperture stitching in increasing the capability of an interferometer is discussed. Parts that would require large transmission spheres can be tested on a stitching system at higher resolution. Advances in the development of algorithms allow system calibration to be an integral part of a stitching system. This enables calibration of lateral errors as well as accurate determination of magnification and distortion.

UR - https://www.scopus.com/pages/publications/0141868831

M3 - Article

AN - SCOPUS:0141868831

SN - 1047-6938

VL - 14

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EP - 43

JO - Optics and Photonics News

JF - Optics and Photonics News

ER -

Stitching Interferometry: A Flexible Solution for Surface Metrology

Abstract

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