Surface cleaning of optical materials using novel VUV sources

D. M. Kane, D. Hirschausen, B. K. Ward, R. P. Mildren, R. J. Carman

Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review

6 Citations (Scopus)


Short pulsed, high peak power VUV output has been obtained from pulsed voltage excitation of high pressure dielectric barrier discharges (DBD). Output with these characteristics has demonstrated advantage over longer pulse DBD VUV sources for several materials processing and surface modification applications. Results using a Xe2' DBD source at 172 nm for removing optical mountants from optical surfaces, for removing hydrocarbon contamination from optical and polymer surfaces, and dehydroxylation of fused silica are presented. Guidelines.

Original languageEnglish
Title of host publicationLaser cleaning II
EditorsD Kane
Place of PublicationSingapore
PublisherWorld Scientific Publishing
Number of pages14
ISBN (Electronic)9789812706843, 9789814476607
ISBN (Print)9812703721, 9789812703729
Publication statusPublished - 2006


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