Short pulsed, high peak power VUV output has been obtained from pulsed voltage excitation of high pressure dielectric barrier discharges (DBD). Output with these characteristics has demonstrated advantage over longer pulse DBD VUV sources for several materials processing and surface modification applications. Results using a Xe2' DBD source at 172 nm for removing optical mountants from optical surfaces, for removing hydrocarbon contamination from optical and polymer surfaces, and dehydroxylation of fused silica are presented. Guidelines.
|Title of host publication||Laser cleaning II|
|Place of Publication||Singapore|
|Publisher||World Scientific Publishing|
|Number of pages||14|
|ISBN (Electronic)||9789812706843, 9789814476607|
|ISBN (Print)||9812703721, 9789812703729|
|Publication status||Published - 2006|