The cavity ring-down spectroscopy of C2 in a microwave plasma

P. John*, J. R. Rabeau, J. I B Wilson

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

38 Citations (Scopus)

Abstract

The formation of C2 in an argon/hydrogen/methane 2.45 GHz microwave plasma has been studied by cavity ring-down spectroscopy and optical emission spectroscopy by observing the d 3IIg-a 3IIu optical transition in absorption and emission, respectively. The two states are shown to be in equilibrium under the plasma conditions adopted for this study. The plasma parameters are similar to those adopted for the growth of nanocrystalline diamond.

Original languageEnglish
Pages (from-to)608-611
Number of pages4
JournalDiamond and Related Materials
Volume11
Issue number3-6
DOIs
Publication statusPublished - Mar 2002
Externally publishedYes

Keywords

  • Chemical vapor deposition
  • Diamond films
  • Plasma
  • Spectroscopy

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