Thermoelectrically controlled varifocal micromirror for near aberration free imaging

Li Li; Ran Li; Walter Lubeigt; Deepak Uttamchandani

doi:10.1109/OMN.2013.6659037

Thermoelectrically controlled varifocal micromirror for near aberration free imaging

Li Li, Ran Li, Walter Lubeigt, Deepak Uttamchandani

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution

1 Citation (Scopus)

Abstract

A close-loop-controlled miniature Peltier element was used to vary the temperature of a 1.2 mm diameter silicon-gold bimorph varifocal micromirror (VFM), thereby changing its radius of curvature due to differential thermal expansion of the two materials. By varying the VFM temperature from 10°C to 100°C, the radius of curvature (ROC) of the micromirror was measured to vary from 19.2mm to 30.9mm. The Zernike coefficients over this operational range were analysed to be less than a few micrometres. An imaging system utilising the VFM was assembled, and examples of the near aberration-free images obtained are presented.

Original language	English
Title of host publication	International Conference on Optical MEMS and Nanophotonics (OMN) 2013
Subtitle of host publication	proceedings
Place of Publication	Piscataway, N.J.
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	17-18
Number of pages	2
ISBN (Print)	9781479915125
DOIs	https://doi.org/10.1109/OMN.2013.6659037
Publication status	Published - 2013
Externally published	Yes
Event	International Conference on Optical MEMS and Nanophotonics - Kanazawa, Japan Duration: 18 Aug 2013 → 22 Aug 2013

Conference

Conference	International Conference on Optical MEMS and Nanophotonics
City	Kanazawa, Japan
Period	18/08/13 → 22/08/13

Access to Document

10.1109/OMN.2013.6659037

Cite this

@inproceedings{355ddfbe0af245428918275d5fb00fa0,

title = "Thermoelectrically controlled varifocal micromirror for near aberration free imaging",

abstract = "A close-loop-controlled miniature Peltier element was used to vary the temperature of a 1.2 mm diameter silicon-gold bimorph varifocal micromirror (VFM), thereby changing its radius of curvature due to differential thermal expansion of the two materials. By varying the VFM temperature from 10°C to 100°C, the radius of curvature (ROC) of the micromirror was measured to vary from 19.2mm to 30.9mm. The Zernike coefficients over this operational range were analysed to be less than a few micrometres. An imaging system utilising the VFM was assembled, and examples of the near aberration-free images obtained are presented.",

author = "Li Li and Ran Li and Walter Lubeigt and Deepak Uttamchandani",

year = "2013",

doi = "10.1109/OMN.2013.6659037",

language = "English",

isbn = "9781479915125",

pages = "17--18",

booktitle = "International Conference on Optical MEMS and Nanophotonics (OMN) 2013",

publisher = "Institute of Electrical and Electronics Engineers (IEEE)",

address = "United States",

note = "International Conference on Optical MEMS and Nanophotonics ; Conference date: 18-08-2013 Through 22-08-2013",

}

Li, L, Li, R, Lubeigt, W & Uttamchandani, D 2013, Thermoelectrically controlled varifocal micromirror for near aberration free imaging. in International Conference on Optical MEMS and Nanophotonics (OMN) 2013: proceedings. Institute of Electrical and Electronics Engineers (IEEE), Piscataway, N.J., pp. 17-18, International Conference on Optical MEMS and Nanophotonics, Kanazawa, Japan, 18/08/13. https://doi.org/10.1109/OMN.2013.6659037

Thermoelectrically controlled varifocal micromirror for near aberration free imaging. / Li, Li; Li, Ran; Lubeigt, Walter et al.
International Conference on Optical MEMS and Nanophotonics (OMN) 2013: proceedings. Piscataway, N.J.: Institute of Electrical and Electronics Engineers (IEEE), 2013. p. 17-18.

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution

TY - GEN

T1 - Thermoelectrically controlled varifocal micromirror for near aberration free imaging

AU - Li, Li

AU - Li, Ran

AU - Lubeigt, Walter

AU - Uttamchandani, Deepak

PY - 2013

Y1 - 2013

N2 - A close-loop-controlled miniature Peltier element was used to vary the temperature of a 1.2 mm diameter silicon-gold bimorph varifocal micromirror (VFM), thereby changing its radius of curvature due to differential thermal expansion of the two materials. By varying the VFM temperature from 10°C to 100°C, the radius of curvature (ROC) of the micromirror was measured to vary from 19.2mm to 30.9mm. The Zernike coefficients over this operational range were analysed to be less than a few micrometres. An imaging system utilising the VFM was assembled, and examples of the near aberration-free images obtained are presented.

AB - A close-loop-controlled miniature Peltier element was used to vary the temperature of a 1.2 mm diameter silicon-gold bimorph varifocal micromirror (VFM), thereby changing its radius of curvature due to differential thermal expansion of the two materials. By varying the VFM temperature from 10°C to 100°C, the radius of curvature (ROC) of the micromirror was measured to vary from 19.2mm to 30.9mm. The Zernike coefficients over this operational range were analysed to be less than a few micrometres. An imaging system utilising the VFM was assembled, and examples of the near aberration-free images obtained are presented.

U2 - 10.1109/OMN.2013.6659037

DO - 10.1109/OMN.2013.6659037

M3 - Conference proceeding contribution

SN - 9781479915125

SP - 17

EP - 18

BT - International Conference on Optical MEMS and Nanophotonics (OMN) 2013

PB - Institute of Electrical and Electronics Engineers (IEEE)

CY - Piscataway, N.J.

T2 - International Conference on Optical MEMS and Nanophotonics

Y2 - 18 August 2013 through 22 August 2013

ER -

Thermoelectrically controlled varifocal micromirror for near aberration free imaging

Abstract

Conference

Access to Document

Fingerprint

Cite this