Thermoelectrically controlled varifocal micromirror for near aberration free imaging

Li Li, Ran Li, Walter Lubeigt, Deepak Uttamchandani

Research output: Chapter in Book/Report/Conference proceedingConference proceeding contribution

1 Citation (Scopus)

Abstract

A close-loop-controlled miniature Peltier element was used to vary the temperature of a 1.2 mm diameter silicon-gold bimorph varifocal micromirror (VFM), thereby changing its radius of curvature due to differential thermal expansion of the two materials. By varying the VFM temperature from 10°C to 100°C, the radius of curvature (ROC) of the micromirror was measured to vary from 19.2mm to 30.9mm. The Zernike coefficients over this operational range were analysed to be less than a few micrometres. An imaging system utilising the VFM was assembled, and examples of the near aberration-free images obtained are presented.
Original languageEnglish
Title of host publicationInternational Conference on Optical MEMS and Nanophotonics (OMN) 2013
Subtitle of host publicationproceedings
Place of PublicationPiscataway, N.J.
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages17-18
Number of pages2
ISBN (Print)9781479915125
DOIs
Publication statusPublished - 2013
Externally publishedYes
EventInternational Conference on Optical MEMS and Nanophotonics - Kanazawa, Japan
Duration: 18 Aug 201322 Aug 2013

Conference

ConferenceInternational Conference on Optical MEMS and Nanophotonics
CityKanazawa, Japan
Period18/08/1322/08/13

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