Toward mid-infrared nonlinear optics applications of silicon carbide microdisks engineered by lateral under-etching

David Allioux; Ali Belarouci; Darren Hudson; Eric Magi; Milan Sinobad; Guillaume Beaudin; Adrien Michon; Neetesh Singh; Regis Orobtchouk; Christian Grillet

doi:10.1364/PRJ.6.000B74

Toward mid-infrared nonlinear optics applications of silicon carbide microdisks engineered by lateral under-etching

David Allioux^*, Ali Belarouci, Darren Hudson, Eric Magi, Milan Sinobad, Guillaume Beaudin, Adrien Michon, Neetesh Singh, Regis Orobtchouk, Christian Grillet

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

We report the fabrication and characterization of silicon carbide microdisks on top of silicon pillars suited for applications from near-to mid-infrared. We probe 10 μm diameter disks with different under-etching depths, from 4 μm down to 1.4 μm, fabricated by isotropic plasma etching and extract quality factors up to 8400 at telecom wavelength. Our geometry is suited to present high Q single-mode operation. We experimentally demonstrate high-order whispering-gallery mode suppression while preserving the fundamental gallery mode and investigate some requirements for nonlinear optics applications on this platform, specifically in terms of quality factor and dispersion for Kerr frequency comb generation.

Original language	English
Pages (from-to)	B74-B81
Number of pages	8
Journal	Photonics Research
Volume	6
Issue number	5
DOIs	https://doi.org/10.1364/PRJ.6.000B74
Publication status	Published - 1 May 2018
Externally published	Yes

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abstract = "We report the fabrication and characterization of silicon carbide microdisks on top of silicon pillars suited for applications from near-to mid-infrared. We probe 10 μm diameter disks with different under-etching depths, from 4 μm down to 1.4 μm, fabricated by isotropic plasma etching and extract quality factors up to 8400 at telecom wavelength. Our geometry is suited to present high Q single-mode operation. We experimentally demonstrate high-order whispering-gallery mode suppression while preserving the fundamental gallery mode and investigate some requirements for nonlinear optics applications on this platform, specifically in terms of quality factor and dispersion for Kerr frequency comb generation.",

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AU - Allioux, David

AU - Belarouci, Ali

AU - Hudson, Darren

AU - Magi, Eric

AU - Sinobad, Milan

AU - Beaudin, Guillaume

AU - Michon, Adrien

AU - Singh, Neetesh

AU - Orobtchouk, Regis

AU - Grillet, Christian

PY - 2018/5/1

Y1 - 2018/5/1

N2 - We report the fabrication and characterization of silicon carbide microdisks on top of silicon pillars suited for applications from near-to mid-infrared. We probe 10 μm diameter disks with different under-etching depths, from 4 μm down to 1.4 μm, fabricated by isotropic plasma etching and extract quality factors up to 8400 at telecom wavelength. Our geometry is suited to present high Q single-mode operation. We experimentally demonstrate high-order whispering-gallery mode suppression while preserving the fundamental gallery mode and investigate some requirements for nonlinear optics applications on this platform, specifically in terms of quality factor and dispersion for Kerr frequency comb generation.

AB - We report the fabrication and characterization of silicon carbide microdisks on top of silicon pillars suited for applications from near-to mid-infrared. We probe 10 μm diameter disks with different under-etching depths, from 4 μm down to 1.4 μm, fabricated by isotropic plasma etching and extract quality factors up to 8400 at telecom wavelength. Our geometry is suited to present high Q single-mode operation. We experimentally demonstrate high-order whispering-gallery mode suppression while preserving the fundamental gallery mode and investigate some requirements for nonlinear optics applications on this platform, specifically in terms of quality factor and dispersion for Kerr frequency comb generation.

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SP - B74-B81

JO - Photonics Research

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IS - 5

ER -

Toward mid-infrared nonlinear optics applications of silicon carbide microdisks engineered by lateral under-etching

Abstract

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