Two-photon lithography of sub-wavelength metallic structures in a polymer matrix

Shobha Shukla, Edward P. Furlani, Xavier Vidal, Mark T. Swihart, Paras N. Prasad

Research output: Contribution to journalArticlepeer-review

53 Citations (Scopus)

Abstract

A novel method for fabricating metallic nanostructures with sub-wavelength resolution in a polymer using simultaneous two-photon initiated reduction of a metal salt and polymerization of a negative photoresist is demonstrated. Gold nanoparticle-doped lines as narrow as 200 nm were fabricated. The dependence of line-width on laser intensity and scan speed are captured well by an analytical model. We created functional gratings and planar chiral elements, characterized their optical properties, and modeled their electromagnetic response.

Original languageEnglish
Pages (from-to)3695-3699
Number of pages5
JournalAdvanced Materials
Volume22
Issue number33
DOIs
Publication statusPublished - 1 Aug 2010
Externally publishedYes

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