Ultra-trace element analysis of NIST SRM 616 and 614 using laser ablation microprobe-inductively coupled plasma-mass spectrometry (LAM-ICP-MS): A comparison with secondary ion mass spectrometry (SIMS)

The microanalytical capability of laser ablation microprobe-inductively coupled plasma-mass spectrometry (LAM-ICP-MS) to determine ultra trace elemental concentrations has been demonstrated by the analysis of two low concentration glass standard reference materials, NIST SRM 614 and 616. Results for fifty two elements at concentrations in the low ng g^-1 range are compared with those determined using secondary ion mass spectrometry (SIMS). Both techniques provide results at these concentrations that generally agree within 95% confidence limits, demonstrating the accuracy for ultra-trace level of in situ determinations by the two techniques. At concentrations of less than 20 ng g^-1 in NIST SRM 616, an accuracy and precision of better than 10% has been obtained for most mono-isotopic rare earth elements, when a spot size of 50 μm is used. Limits of detection for selected elements were as low as 0.5 ng g^-1.