Ultrahigh resistivity aluminum nitride grown on mercury cadmium telluride

K. S A Butcher, T. L. Tansley

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)
7 Downloads (Pure)

Abstract

Aluminum nitride insulating layers have been grown at room temperature with a film resistivity of 3.3×1016 cm on mercury cadmium telluride substrates. Insulator breakdown fields of 640 MV/m were reached. Capacitance-voltage measurements with Al/AlN/Hg0.76Cd0.24Te metalinsulator-semiconductor devices demonstrate band bending at the semiconductor surface indicating that damage to the substrate was minimized during film growth. A fixed interface charge density (given here as total charge per unit area divided by the electron charge=Qss/q) of +2×1011 cm-2 and a slow interface state density of 4×1010 cm-2 were measured. The procedures for achieving these high quality insulating layers are reported. Frequency dependent dielectric constant and dielectric loss tangent measurements, carried out at room temperature and 100 K, are also presented.

Original languageEnglish
Pages (from-to)6217-6221
Number of pages5
JournalJournal of Applied Physics
Volume90
Issue number12
DOIs
Publication statusPublished - 15 Dec 2001

Bibliographical note

Copyright 2001 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Applied physics letters, Vol. 90, Issue 12, pp.6217-6221, and may be found at http://link.aip.org/link/?jap/90/006217.

Fingerprint

Dive into the research topics of 'Ultrahigh resistivity aluminum nitride grown on mercury cadmium telluride'. Together they form a unique fingerprint.

Cite this