UV micromachining of polymers with frequency doubled copper vapour lasers

D. W. Coutts; A. C J Glover; D. J. Ramsay; J. A. Piper

doi:10.1109/CLEOE.1994.636521

UV micromachining of polymers with frequency doubled copper vapour lasers

D. W. Coutts^*, A. C J Glover, D. J. Ramsay, J. A. Piper

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

Abstract

Many materials are best machined using uv lasers sources which until recently has been the principal laser used in uv machining applications. The uv outputs available from frequency doubling of CVLs can now be generated with good efficiency to yield multi-watt diffraction-limited output ideal for uv micromachining. Recent progress has come through a greater understanding of the control of CVL beam quality and improvements in focusing geometries for the nonlinear frequency conversion process.

Original language	English
Title of host publication	Conference on Lasers and Electro-Optics Europe, CLEO/Europe 1994
Place of Publication	Pistacaway, NJ
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	295-295
Number of pages	1
ISBN (Print)	0780317890
DOIs	https://doi.org/10.1109/CLEOE.1994.636521
Publication status	Published - 1994
Event	Proceedings of the 1994 Conference on Lasers and Electro-Optics Europe - Amsterdam, Neth Duration: 28 Aug 1994 → 2 Sept 1994

Other

Other	Proceedings of the 1994 Conference on Lasers and Electro-Optics Europe
City	Amsterdam, Neth
Period	28/08/94 → 2/09/94

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10.1109/CLEOE.1994.636521

Cite this

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title = "UV micromachining of polymers with frequency doubled copper vapour lasers",

abstract = "Many materials are best machined using uv lasers sources which until recently has been the principal laser used in uv machining applications. The uv outputs available from frequency doubling of CVLs can now be generated with good efficiency to yield multi-watt diffraction-limited output ideal for uv micromachining. Recent progress has come through a greater understanding of the control of CVL beam quality and improvements in focusing geometries for the nonlinear frequency conversion process.",

author = "Coutts, {D. W.} and Glover, {A. C J} and Ramsay, {D. J.} and Piper, {J. A.}",

year = "1994",

doi = "10.1109/CLEOE.1994.636521",

language = "English",

isbn = "0780317890",

pages = "295--295",

booktitle = "Conference on Lasers and Electro-Optics Europe, CLEO/Europe 1994",

publisher = "Institute of Electrical and Electronics Engineers (IEEE)",

address = "United States",

note = "Proceedings of the 1994 Conference on Lasers and Electro-Optics Europe ; Conference date: 28-08-1994 Through 02-09-1994",

}

Coutts, DW, Glover, ACJ, Ramsay, DJ & Piper, JA 1994, UV micromachining of polymers with frequency doubled copper vapour lasers. in Conference on Lasers and Electro-Optics Europe, CLEO/Europe 1994., 636521, Institute of Electrical and Electronics Engineers (IEEE), Pistacaway, NJ, pp. 295-295, Proceedings of the 1994 Conference on Lasers and Electro-Optics Europe, Amsterdam, Neth, 28/08/94. https://doi.org/10.1109/CLEOE.1994.636521

UV micromachining of polymers with frequency doubled copper vapour lasers. / Coutts, D. W.; Glover, A. C J; Ramsay, D. J. et al.
Conference on Lasers and Electro-Optics Europe, CLEO/Europe 1994. Pistacaway, NJ: Institute of Electrical and Electronics Engineers (IEEE), 1994. p. 295-295 636521.

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

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Y1 - 1994

N2 - Many materials are best machined using uv lasers sources which until recently has been the principal laser used in uv machining applications. The uv outputs available from frequency doubling of CVLs can now be generated with good efficiency to yield multi-watt diffraction-limited output ideal for uv micromachining. Recent progress has come through a greater understanding of the control of CVL beam quality and improvements in focusing geometries for the nonlinear frequency conversion process.

AB - Many materials are best machined using uv lasers sources which until recently has been the principal laser used in uv machining applications. The uv outputs available from frequency doubling of CVLs can now be generated with good efficiency to yield multi-watt diffraction-limited output ideal for uv micromachining. Recent progress has come through a greater understanding of the control of CVL beam quality and improvements in focusing geometries for the nonlinear frequency conversion process.

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M3 - Conference proceeding contribution

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SN - 0780317890

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EP - 295

BT - Conference on Lasers and Electro-Optics Europe, CLEO/Europe 1994

PB - Institute of Electrical and Electronics Engineers (IEEE)

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T2 - Proceedings of the 1994 Conference on Lasers and Electro-Optics Europe

Y2 - 28 August 1994 through 2 September 1994

ER -

UV micromachining of polymers with frequency doubled copper vapour lasers

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