UV micromachining using copper vapour lasers

D. W. Coutts, A. C. J. Glover, E. K. Illy, D. J. W. Brown, J. A. Piper

    Research output: Chapter in Book/Report/Conference proceedingConference proceeding contributionpeer-review

    Abstract

    UV output powers in excess of 1W at 255nm can readily be generated by SHG from single, medium-scale copper vapour lasers. The high PRF and high beam quality makes the frequency-doubled CVL an ideal source for many UV micromachining applications such as drilling micro-orifices in polymers at high production rates.

    Original languageEnglish
    Title of host publicationPulsed metal vapour lasers
    EditorsChris E. Little, Nikola V. Sabotinov
    PublisherKLUWER ACADEMIC PUBL
    Pages365-370
    Number of pages6
    ISBN (Print)0792340027
    DOIs
    Publication statusPublished - 1996
    EventNATO Advanced Research Workshop on Pulsed Metal Vapour Lasers - Physics and Emerging Applications in Industry, Medicine and Science - St Andrews, United Kingdom
    Duration: 6 Aug 199510 Aug 1995

    Publication series

    NameNATO ADVANCED SCIENCE INSTITUTE SERIES, SUB-SERIES 1: DISARMAMENT TECHNOLOGIES
    PublisherKLUWER ACADEMIC PUBL
    Volume5

    Conference

    ConferenceNATO Advanced Research Workshop on Pulsed Metal Vapour Lasers - Physics and Emerging Applications in Industry, Medicine and Science
    CountryUnited Kingdom
    CitySt Andrews
    Period6/08/9510/08/95

    Keywords

    • ablation rate
    • ablation depth
    • copper vapour laser
    • high average power
    • unstable resonator

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