UV micromachining using copper vapour lasers

D. W. Coutts; A. C. J. Glover; E. K. Illy; D. J. W. Brown; J. A. Piper

doi:10.1007/978-94-009-1669-2_38

UV micromachining using copper vapour lasers

D. W. Coutts, A. C. J. Glover, E. K. Illy, D. J. W. Brown, J. A. Piper

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

Abstract

UV output powers in excess of 1W at 255nm can readily be generated by SHG from single, medium-scale copper vapour lasers. The high PRF and high beam quality makes the frequency-doubled CVL an ideal source for many UV micromachining applications such as drilling micro-orifices in polymers at high production rates.

Original language	English
Title of host publication	Pulsed metal vapour lasers
Editors	Chris E. Little, Nikola V. Sabotinov
Publisher	KLUWER ACADEMIC PUBL
Pages	365-370
Number of pages	6
ISBN (Print)	0792340027
DOIs	https://doi.org/10.1007/978-94-009-1669-2_38
Publication status	Published - 1996
Event	NATO Advanced Research Workshop on Pulsed Metal Vapour Lasers - Physics and Emerging Applications in Industry, Medicine and Science - St Andrews, United Kingdom Duration: 6 Aug 1995 → 10 Aug 1995

Publication series

Name	NATO ADVANCED SCIENCE INSTITUTE SERIES, SUB-SERIES 1: DISARMAMENT TECHNOLOGIES
Publisher	KLUWER ACADEMIC PUBL
Volume	5

Conference

Conference	NATO Advanced Research Workshop on Pulsed Metal Vapour Lasers - Physics and Emerging Applications in Industry, Medicine and Science
Country/Territory	United Kingdom
City	St Andrews
Period	6/08/95 → 10/08/95

Keywords

ablation rate
ablation depth
copper vapour laser
high average power
unstable resonator

Access to Document

10.1007/978-94-009-1669-2_38

Cite this

Coutts, D. W., Glover, A. C. J., Illy, E. K., Brown, D. J. W., & Piper, J. A. (1996). UV micromachining using copper vapour lasers. In C. E. Little, & N. V. Sabotinov (Eds.), Pulsed metal vapour lasers (pp. 365-370). (NATO ADVANCED SCIENCE INSTITUTE SERIES, SUB-SERIES 1: DISARMAMENT TECHNOLOGIES; Vol. 5). KLUWER ACADEMIC PUBL. https://doi.org/10.1007/978-94-009-1669-2_38

@inproceedings{5b96e2dab10140b68eb19db446c20c0f,

title = "UV micromachining using copper vapour lasers",

abstract = "UV output powers in excess of 1W at 255nm can readily be generated by SHG from single, medium-scale copper vapour lasers. The high PRF and high beam quality makes the frequency-doubled CVL an ideal source for many UV micromachining applications such as drilling micro-orifices in polymers at high production rates.",

keywords = "ablation rate, ablation depth, copper vapour laser, high average power, unstable resonator",

author = "Coutts, {D. W.} and Glover, {A. C. J.} and Illy, {E. K.} and Brown, {D. J. W.} and Piper, {J. A.}",

year = "1996",

doi = "10.1007/978-94-009-1669-2_38",

language = "English",

isbn = "0792340027",

series = "NATO ADVANCED SCIENCE INSTITUTE SERIES, SUB-SERIES 1: DISARMAMENT TECHNOLOGIES",

publisher = "KLUWER ACADEMIC PUBL",

pages = "365--370",

editor = "Little, {Chris E.} and Sabotinov, {Nikola V.}",

booktitle = "Pulsed metal vapour lasers",

note = "NATO Advanced Research Workshop on Pulsed Metal Vapour Lasers - Physics and Emerging Applications in Industry, Medicine and Science ; Conference date: 06-08-1995 Through 10-08-1995",

}

Coutts, DW, Glover, ACJ, Illy, EK, Brown, DJW & Piper, JA 1996, UV micromachining using copper vapour lasers. in CE Little & NV Sabotinov (eds), Pulsed metal vapour lasers. NATO ADVANCED SCIENCE INSTITUTE SERIES, SUB-SERIES 1: DISARMAMENT TECHNOLOGIES, vol. 5, KLUWER ACADEMIC PUBL, pp. 365-370, NATO Advanced Research Workshop on Pulsed Metal Vapour Lasers - Physics and Emerging Applications in Industry, Medicine and Science, St Andrews, United Kingdom, 6/08/95. https://doi.org/10.1007/978-94-009-1669-2_38

UV micromachining using copper vapour lasers. / Coutts, D. W.; Glover, A. C. J.; Illy, E. K. et al.
Pulsed metal vapour lasers. ed. / Chris E. Little; Nikola V. Sabotinov. KLUWER ACADEMIC PUBL, 1996. p. 365-370 (NATO ADVANCED SCIENCE INSTITUTE SERIES, SUB-SERIES 1: DISARMAMENT TECHNOLOGIES; Vol. 5).

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

TY - GEN

T1 - UV micromachining using copper vapour lasers

AU - Coutts, D. W.

AU - Glover, A. C. J.

AU - Illy, E. K.

AU - Brown, D. J. W.

AU - Piper, J. A.

PY - 1996

Y1 - 1996

N2 - UV output powers in excess of 1W at 255nm can readily be generated by SHG from single, medium-scale copper vapour lasers. The high PRF and high beam quality makes the frequency-doubled CVL an ideal source for many UV micromachining applications such as drilling micro-orifices in polymers at high production rates.

AB - UV output powers in excess of 1W at 255nm can readily be generated by SHG from single, medium-scale copper vapour lasers. The high PRF and high beam quality makes the frequency-doubled CVL an ideal source for many UV micromachining applications such as drilling micro-orifices in polymers at high production rates.

KW - ablation rate

KW - ablation depth

KW - copper vapour laser

KW - high average power

KW - unstable resonator

U2 - 10.1007/978-94-009-1669-2_38

DO - 10.1007/978-94-009-1669-2_38

M3 - Conference proceeding contribution

SN - 0792340027

T3 - NATO ADVANCED SCIENCE INSTITUTE SERIES, SUB-SERIES 1: DISARMAMENT TECHNOLOGIES

SP - 365

EP - 370

BT - Pulsed metal vapour lasers

A2 - Little, Chris E.

A2 - Sabotinov, Nikola V.

PB - KLUWER ACADEMIC PUBL

T2 - NATO Advanced Research Workshop on Pulsed Metal Vapour Lasers - Physics and Emerging Applications in Industry, Medicine and Science

Y2 - 6 August 1995 through 10 August 1995

ER -

UV micromachining using copper vapour lasers

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Keywords

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