UV micromachining using copper vapour lasers

D. W. Coutts, A. C. J. Glover, E. K. Illy, D. J. W. Brown, J. A. Piper

Research output: Chapter in Book/Report/Conference proceedingConference proceeding contribution

Abstract

UV output powers in excess of 1W at 255nm can readily be generated by SHG from single, medium-scale copper vapour lasers. The high PRF and high beam quality makes the frequency-doubled CVL an ideal source for many UV micromachining applications such as drilling micro-orifices in polymers at high production rates.

Original languageEnglish
Title of host publicationPulsed metal vapour lasers
EditorsChris E. Little, Nikola V. Sabotinov
PublisherKLUWER ACADEMIC PUBL
Pages365-370
Number of pages6
ISBN (Print)0792340027
DOIs
Publication statusPublished - 1996
EventNATO Advanced Research Workshop on Pulsed Metal Vapour Lasers - Physics and Emerging Applications in Industry, Medicine and Science - St Andrews, United Kingdom
Duration: 6 Aug 199510 Aug 1995

Publication series

NameNATO ADVANCED SCIENCE INSTITUTE SERIES, SUB-SERIES 1: DISARMAMENT TECHNOLOGIES
PublisherKLUWER ACADEMIC PUBL
Volume5

Conference

ConferenceNATO Advanced Research Workshop on Pulsed Metal Vapour Lasers - Physics and Emerging Applications in Industry, Medicine and Science
CountryUnited Kingdom
CitySt Andrews
Period6/08/9510/08/95

Keywords

  • ablation rate
  • ablation depth
  • copper vapour laser
  • high average power
  • unstable resonator

Cite this

Coutts, D. W., Glover, A. C. J., Illy, E. K., Brown, D. J. W., & Piper, J. A. (1996). UV micromachining using copper vapour lasers. In C. E. Little, & N. V. Sabotinov (Eds.), Pulsed metal vapour lasers (pp. 365-370). (NATO ADVANCED SCIENCE INSTITUTE SERIES, SUB-SERIES 1: DISARMAMENT TECHNOLOGIES; Vol. 5). KLUWER ACADEMIC PUBL. https://doi.org/10.1007/978-94-009-1669-2_38