Abstract
Low frequency vibrational stirring was applied to a LPE growth crucible. The GaAs epitaxial layers grown showed superior crystallinity, as revealed by optical microscopy. Inclusions of Ga noted earlier were eliminated with a notable improvement in the interface layer, resulting in good crystal surface topology.
Original language | English |
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Pages (from-to) | 378-380 |
Number of pages | 3 |
Journal | Journal of Crystal Growth |
Volume | 125 |
Issue number | 1-2 |
DOIs | |
Publication status | Published - 2 Nov 1992 |